[PC5-6] Comparison of Different Processes in the Fabrication of Crystallized Amorphous Silicon Thin Film Transistors

N. T. Tran、M. P. Keyes、S. Shiffman、G. Liu、S. J. Fonash (1.Graphic Research Lab.、2.Center for Electronic Materials & Processing The Pennsylvania State University)

https://doi.org/10.7567/SSDM.1991.PC5-6