[PC5-7] Crystallinity Improvement of Small Grained Poly-Si Films by Excimer Laser Annealing for High Performance TFT's

Takashi Noguchi, Hironori Tsukamoto, Toshiharu Suzuki, Haruko Masuya (1.Process Technology Div., ULSI R&D Group, Sony Corp.)

https://doi.org/10.7567/SSDM.1991.PC5-7