[PC6-5] Internal Barrier Height Lowering Due to Grain Boundary Charge Repopulation in Polycrystalline Silicon

Mariko Takayanagi Takagi, Masao Iwase, Akira Toriumi (1.ULSI Research Center, TOSHIBA Corporation)

https://doi.org/10.7567/SSDM.1991.PC6-5