[S-C-7] Direct Pattern Delineation of Fluoride Films with Multilayer-Monochromatized Synchrotron Radiation with Real-Time Monitoring by SR-Excited Auger Electrons

Masaharu OSHIMA、Satoshi MAEYAMA、Hisataka TAKENAKA、Yoshikazu ISHII、Hirohiko SUGAHARA (1.NTT Applied Electronics Laboratories、2.NTT LSI Laboratories)

https://doi.org/10.7567/SSDM.1991.S-C-7