[B-1-6] In-Situ Doped CMOS Polysilicon Thin Film Transistors

Byung-Hyuk Min, Cheol-Min Park, Byung-Seong Bae, Min-Koo Han (1.Dept. of Electrical Engineering, Seoul National University, 2.Special Marketing Team/Poly PJT, Samsung Electronics Co.)

https://doi.org/10.7567/SSDM.1995.B-1-6