[B-5-2] Impact of μ A-ON-Current Gate All-Around TFT (GAT) for 16MSRAM and Beyond

Shigeto MAEGAWA, Takashi IPPOSHI, Shigenobu MAEDA, Hirotada KURIYAMA, Yoshio KOHNO, Yasuo INOUE, Tadashi HIRAO (1.ULSI Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1995.B-5-2