[B-5-4] PMOS Thin-Film Transistors Fabricated in RTCVD Polycrystalline Silicon Germanium Films

Seo-Kyu Lee, Hyung-Geun Kim, Wook-Jin Chung, B. K. Kang, Ohyun Kim (1.Department of Electronic and Electrical Engineering, Pohang University of Science and Technology, 2.Research Institute of Industrial Science and Technology, 3.LG Semiconductor Co. Ltd.)

https://doi.org/10.7567/SSDM.1995.B-5-4