[B-5-4] PMOS Thin-Film Transistors Fabricated in RTCVD Polycrystalline Silicon Germanium Films

Seo-Kyu Lee、Hyung-Geun Kim、Wook-Jin Chung、B. K. Kang、Ohyun Kim (1.Department of Electronic and Electrical Engineering, Pohang University of Science and Technology、2.Research Institute of Industrial Science and Technology、3.LG Semiconductor Co. Ltd.)

https://doi.org/10.7567/SSDM.1995.B-5-4