[B-6-3] Analysis of Structure-Dependent Hot Carrier Effect in Various LDD MOSFET's Using an Efficient Interface State Profiling Method

J.-J. Yang、Steve S. Chung、P.-C. Chou、J.-R. Shih、C.-H. Chen、M.-S. Lin (1.Department of Electronic Engineering, National Chiao Tung University、2.Taiwan Semiconductor Manufacturing Co.)

https://doi.org/10.7567/SSDM.1995.B-6-3