[B-6-3] Analysis of Structure-Dependent Hot Carrier Effect in Various LDD MOSFET's Using an Efficient Interface State Profiling Method

J.-J. Yang, Steve S. Chung, P.-C. Chou, J.-R. Shih, C.-H. Chen, M.-S. Lin (1.Department of Electronic Engineering, National Chiao Tung University, 2.Taiwan Semiconductor Manufacturing Co.)

https://doi.org/10.7567/SSDM.1995.B-6-3