[C-2-2] Ultra Shallow p+n Junction Formation Using the Solid Phase Diffusion(SPD) through 'a-Si/Thin Barrier Oxide' Layer

Sang Jik Kwon、Byung Gook Park、Jong Duk Lee (1.Dept. of Electronics Engineering, Kyungwon Univ.、2.Inter-Univ. Semicon. Res. Center, Seoul Nat. Univ.)

https://doi.org/10.7567/SSDM.1995.C-2-2