[C-2-3] On the Use of Indium and Gallium as P-Type Dopants in Si 0.1 μm MOSFETs

Serge Biesemans, Stefan Kubicek, Joris VanLaer, Fred Loosen, Luc Geenen, Karen Maex, Kristin DeMeyer (1.ASP division, IMEC)

https://doi.org/10.7567/SSDM.1995.C-2-3