The Japan Society of Applied Physics

[PC-1-2] Highly Reliable Ultra Thin Gate Dielectrics for Dual-Gate CMOS Devices

L. K. Han, D. Wristers, T. S. Chen, C. Lin, K. Chen J. Fulford, D. L. Kwong (1.Microelectronics Research Center, Department of Electrical and Computer Engineering The University of Texas, 2.Advanced Micro Devices)

https://doi.org/10.7567/SSDM.1995.PC-1-2