[PC-10-3] Advanced Quality in Epitaxial Layer Transfer by Bond and Etch-Back of Porous Si

Nobuhiko SATO, Kiyofumi SAKAGUCHI, Kenji YAMAGATA, Yasutomo FUJIYAMA, Jun NAKAYAMA, Takao YONEHARA (1.Device Development Center, R&D Headquarters, Canon Inc.)

https://doi.org/10.7567/SSDM.1995.PC-10-3