[PC-10-9] Modeling on the Channel-To-S/D Capacitance and the Short Channel Effect for 0.1μm Fully Depleted SOI-MOSFET

Risho Koh, Haruo Kato, Hiroshi Matsumoto (1.Microelectronics Res. Labs., ULSI Device Development Labs. NEC Corp.)

https://doi.org/10.7567/SSDM.1995.PC-10-9