[PC-11-4] Reliability of Non-Uniformly Doped Channel (NUDC) MOSFETs for Sub-Quarter-Micron Region

M. Shirahata, Y. Okumura, Y. Abe, T. Kuroi, M. Inuishi, T. Hirao (1.ULSI Laboratory, Mitsubishi Electric Corporation, 2.Semiconductor Research Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1995.PC-11-4