[PC-11-4] Reliability of Non-Uniformly Doped Channel (NUDC) MOSFETs for Sub-Quarter-Micron Region

M. Shirahata、Y. Okumura、Y. Abe、T. Kuroi、M. Inuishi、T. Hirao (1.ULSI Laboratory, Mitsubishi Electric Corporation、2.Semiconductor Research Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1995.PC-11-4