A High Pressure High Temperature Poly Buffer LOCOS (HP-HTPBL) Isolation Process for 1Gbit Density Non Volatile Memories

[PC-12-1] A High Pressure High Temperature Poly Buffer LOCOS (HP-HTPBL) Isolation Process for 1Gbit Density Non Volatile Memories

S. DELEONIBUS, F. MARTIN, S. S. KIM, A. EMAMI, B. FLORIN, M. HEITZMANN, C. LEROUX (1.LETI(CEA) Dept de Microelectronique, 2.GASONICS International)