[PC-12-1] A High Pressure High Temperature Poly Buffer LOCOS (HP-HTPBL) Isolation Process for 1Gbit Density Non Volatile Memories

S. DELEONIBUS、F. MARTIN、S. S. KIM、A. EMAMI、B. FLORIN、M. HEITZMANN、C. LEROUX (1.LETI(CEA) Dept de Microelectronique、2.GASONICS International)

https://doi.org/10.7567/SSDM.1995.PC-12-1