[PC-12-3] Dry O2 Hgh Pressure Field Oxidation for 0.25 μm Isolation Technology

Viju K. MATHEWS, Pierre C. FAZAN, Nanseng JENG, Sang S. KIM, Alan EMAMI (1.Micron Technology, Inc., 2.Gasonics International)

https://doi.org/10.7567/SSDM.1995.PC-12-3