[PC-2-1] Electrical Characterizations of Pt/(Ba,Sr)TiO3/Pt Planar Capacitors for ULSI DRAM Applications

Soon Oh Park、Cheol Seong Hwang、Hag-Ju Cho、Chang Seok Kang、Ho-Kyu Kang、Sang In Lee、Moon Yong Lee (1.SAMSUNG Electronics Co., Semiconductor R&D Center, Memory Process Developement Team 2)

https://doi.org/10.7567/SSDM.1995.PC-2-1