[PC-2-1] Electrical Characterizations of Pt/(Ba,Sr)TiO3/Pt Planar Capacitors for ULSI DRAM Applications

Soon Oh Park, Cheol Seong Hwang, Hag-Ju Cho, Chang Seok Kang, Ho-Kyu Kang, Sang In Lee, Moon Yong Lee (1.SAMSUNG Electronics Co., Semiconductor R&D Center, Memory Process Developement Team 2)

https://doi.org/10.7567/SSDM.1995.PC-2-1