[PC-2-3] Substrate Orientation Dependence of the Properties of Metal-Ferroelectric BaMgF4-Silicon Capacitors by Post-Deposition Annealing

Kwang-Ho Kim、Je-Deok Kim、Hiroshi Ishiwara (1.Department of Semiconductor Engineering, Cheong-Ju University、2.Precision and Intelligence Laboratory, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1995.PC-2-3