[PC-3-4] Optimization of Contact Process with Monte-Carlo Study for Advanced CMOS Devices

Hirofumi Sumi、Toshiharu Yanagida、Hiroshi Yamada、Yuichi Miyamori、Yukiyasu Sugano、Satoru Kishida、Heizo Tokutaka (1.MOS LSI Division, Semiconductor Company, Sony Corp.、2.Department of Electrical and Electronic Engineering, Tottori University)

https://doi.org/10.7567/SSDM.1995.PC-3-4