[PC-3-4] Optimization of Contact Process with Monte-Carlo Study for Advanced CMOS Devices

Hirofumi Sumi, Toshiharu Yanagida, Hiroshi Yamada, Yuichi Miyamori, Yukiyasu Sugano, Satoru Kishida, Heizo Tokutaka (1.MOS LSI Division, Semiconductor Company, Sony Corp., 2.Department of Electrical and Electronic Engineering, Tottori University)

https://doi.org/10.7567/SSDM.1995.PC-3-4