New Characterization of TiSi2 Local Wiring Technology and Its Impact on Low Power / High Speed Quarter Micron CMOS

[PC-3-7] New Characterization of TiSi2 Local Wiring Technology and Its Impact on Low Power / High Speed Quarter Micron CMOS

Atsushi OHTOMO, Jiro IDA, Nobuo OZAWA, Makiko KAGEYAMA, Hiroshi ONODA (1.VLSI Research and Development Center, OKI Electric Industry Co., Ltd.)