[PC-3-8] High-Speed and Low-Power Interconnect Technology for Sub-Quarter-Micron ASICs

Masafumi MIYAMOTO, Toshifumi TAKEDA, Takeshi FURUSAWA (1.Advanced Device Development Dept., Semiconductor Development Center, Hitachi Ltd., 2.Process Engineering Development Dept., Semiconductor & IC Division, Hitachi Ltd., 3.ULSI Research Dept., Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1995.PC-3-8