The Japan Society of Applied Physics

[PC-4-4] Fabrication and Transport Properties of Gate-All-Around Silicon Quantum Wire Transistor

K. Morimoto, Y. Hirai, K. Yuki, K. Morita (1.Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.1995.PC-4-4