[PC-5-1] Characterization of Charged Traps near Si-SiO2 Interface in Photo-CVD SiO2 Film

Hideaki YAMAMOTO、Sinya IWASAKI、Katsuhide OKUMURA、Takeshi KANASHIMA、Masanori OKUYAMA、Yoshihiro HAMAKAWA (1.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)

https://doi.org/10.7567/SSDM.1995.PC-5-1