[PC-6-5] Atomic-Scale Planarization of 6-Inch Si(001) Substrate by UHV Heating

Ken IDOTA、Masaaki NIWA、Isao SUMITA (1.Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd.、2.Matsushita Research Institute Tokyo, Inc.)

https://doi.org/10.7567/SSDM.1995.PC-6-5