The Japan Society of Applied Physics

[PC-8-1] Effects of Channel Thickness on Poly-Crystalline Silicon Thin Film Transistors

Mitsutoshi MIYASAKA, Tadakazu KOMATSU, Wataru ITOH, Akemi YAMAGUCHI, Hiroyuki OHSHIMA (1.SEIKO EPSON CORPORATION Active Device Research Laboratory / Analysis Center)

https://doi.org/10.7567/SSDM.1995.PC-8-1