The Japan Society of Applied Physics

[PC-8-4] Self-Aligned Offset Gated Poly-Si TFTs by Employing a Photo Resistor Reflow Process

Cheol-Min Park, Byung-Hyuk Min, Keun-Ho Jang, Jae-Hong Jun, Min-Koo Han (1.Dept. of Electrical Engineering, Seoul National University)

https://doi.org/10.7567/SSDM.1995.PC-8-4