[PD-2-3] Excellent Thermally-Stable Epitaxial Channel for Implanted Planar-Type Hetero-Junction Field-Effect Transistors

Shigeharu Matsushita, Emi Fujii, Daijiro Inoue, Satoshi Terada, Seiichi Banba, Kohji Matsumura, Minoru Sawada, Yasoo Harada (1.Microelectronics Research Center, SANYO Electric Co., Ltd.)

https://doi.org/10.7567/SSDM.1995.PD-2-3