[PD-L1-L7] Fabrication of Si/Al2O3/Si SOI Structures Grownf80by the UHV-CVD Method

T. Kimura, A. Sengoku, M. Ishida (1.Department of Electrical and Electronic Engineering, Toyohashi University of Technology)

https://doi.org/10.7567/SSDM.1995.PD-L1-L7