[PD-L2-L5] Ruduction of Threading Dislocation Density in InP-on-Si Heteroepitaxy with Strained Short-Periods Superlattices

K. Samonji、Y. Takagi、H. Yonezu、K. Iwaki、N. Ohshima、J. K. Shin、K. Pak (1.Department of Electrical & Electronic Engineering, Toyohashi University of Technology)

https://doi.org/10.7567/SSDM.1995.PD-L2-L5