[PD-L2-L5] Ruduction of Threading Dislocation Density in InP-on-Si Heteroepitaxy with Strained Short-Periods Superlattices

K. Samonji, Y. Takagi, H. Yonezu, K. Iwaki, N. Ohshima, J. K. Shin, K. Pak (1.Department of Electrical & Electronic Engineering, Toyohashi University of Technology)

https://doi.org/10.7567/SSDM.1995.PD-L2-L5