[S-I-3-2] Interface States in Top Gate Metal-Silicon Nitride-Silicon Structures

J. Kanicki S. Backert, N. Picard (1.Center for Display Technology and Manufacturing The University of Michigan, 2.Department of Solid State Physics Ecole Polytechnique)

https://doi.org/10.7567/SSDM.1995.S-I-3-2