[S-I-3-3] Oxynitride Pad LOCOS (ON-LOCOS) Isolation Technology for Gigabit DRAMs

Yasuhiro Sambonsugi, Tatsuya Yamazaki, Shoichiro Kawashima, Toshihiro Sugii (1.FUJITSU LABORATORIES LTD.)

https://doi.org/10.7567/SSDM.1995.S-I-3-3