[S-I-3-3] Oxynitride Pad LOCOS (ON-LOCOS) Isolation Technology for Gigabit DRAMs Yasuhiro Sambonsugi、Tatsuya Yamazaki、Shoichiro Kawashima、Toshihiro Sugii (1.FUJITSU LABORATORIES LTD.) https://doi.org/10.7567/SSDM.1995.S-I-3-3
