[S-I-6-1] Developments in Consumables Used in the Chemical Mechanical Polishing of Dielectrics

Srinivasan Sivaram, Robert Tolles, Anantha Sethuraman (1.Intel Corp., 2.Applied Materials, 3.Rodel Corp.)

https://doi.org/10.7567/SSDM.1995.S-I-6-1