[S-I-8-1] Thermal Budget for Fabricating A Dual Gate Deep-Submicron CMOS with Thin Pure Gate Oxide

Kunihiro Suzuki, Akira Satoh, Takayuki Aoyama, Itaru Namura, Fumihiko Inoue, Yuji Kataoka, Yoko Tada, Toshihiro Sugii (1.Fujitsu Laboratories Ltd.)

https://doi.org/10.7567/SSDM.1995.S-I-8-1