[S-I-8-2] New Dielectric Breakdown Model of Local Wearout in Ultra Thin Silicon Dioxides

Kenji OKADA, Satoko KAWASAKI (1.Micro Computer Division, Matsushita Electronics Corp., 2.Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd.)

https://doi.org/10.7567/SSDM.1995.S-I-8-2