[S-IV-4] W as a BIT Line Interconnection in COB Structured DRAM and Feasible Diffusion Barrier Layer

Jeong Soo Byun, Jun Ki Kim, Jin Won Park, Jae Jeong Kim (1.ULSI Laboratory of LG Semicon Co. Ltd.)

https://doi.org/10.7567/SSDM.1995.S-IV-4