The Japan Society of Applied Physics

[A-1-1] Atomic-Scale and Hierarchical Modeling for Nano-Electronics

Robert W. Dutton, Edwin C. Kan, Shinji Onga, Takako Okada (1.Center for Integrated Systems, Stanford University, 2.ULSI Research Center, Toshiba)

https://doi.org/10.7567/SSDM.1996.A-1-1