[A-5-3] Advanced Ti Salicide Technology for High Performance Quarter-Micron Logic LSIs

Jun Suenaga, Hirofumi Sumi, Kazuhiro Tajima, Atsushi Horiuchi, Michihiro Kanno, Yutaka Okamoto (1.MOS Process dept., MOS LSI div., Semiconductor Company, Sony Corporation)

https://doi.org/10.7567/SSDM.1996.A-5-3