[A-5-3] Advanced Ti Salicide Technology for High Performance Quarter-Micron Logic LSIs
Jun Suenaga、Hirofumi Sumi、Kazuhiro Tajima、Atsushi Horiuchi、Michihiro Kanno、Yutaka Okamoto
(1.MOS Process dept., MOS LSI div., Semiconductor Company, Sony Corporation)
https://doi.org/10.7567/SSDM.1996.A-5-3