[B-5-1] Device Characteristics and Reliability of Thin Gate Dielectrics Grown by Light Wet Oxynitridation(LWO)

Moon-Sig Joo, Seok-Kiu Lee, Young-Jin Park, Jong-Choul Kim (1.Memory R&D Division, Hyundai Electronics Industries Co., Ltd.)

https://doi.org/10.7567/SSDM.1996.B-5-1