[C-2-4] Demonstration of an Electronic Grade Ti/AlN/Si Metal-Insulator-Semiconductor Capacitor

X. Zhang、D. Walker、A. Saxler、P. Kung、J. Xu、M. Razeghi (1.Center for Quantum Devices, EECS Department, Northwestern University)

https://doi.org/10.7567/SSDM.1996.C-2-4