[C-2-4] Demonstration of an Electronic Grade Ti/AlN/Si Metal-Insulator-Semiconductor Capacitor

X. Zhang, D. Walker, A. Saxler, P. Kung, J. Xu, M. Razeghi (1.Center for Quantum Devices, EECS Department, Northwestern University)

https://doi.org/10.7567/SSDM.1996.C-2-4