[D-6-3] 3D-Technology for Ultra High Density MOS Arrays

Wolfgang H. KRAUTSCHNEIDER, Andreas RUSCH, Franz HOFMANN, Frank LAU, Barbara HASLER, Armin KOHLHASE, Ulrich ZIMMERMANN, Emmerich BERTAGNOLLI (1.Siemens, Corporate Research, 2.Siemens, Semiconductor Group)

https://doi.org/10.7567/SSDM.1996.D-6-3